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org in March 2012
colorless liquid which hydrolizes in the presence of moisture
semiconductor processes as reflected in a number of existing standards
SEMI C2 — Specifications for Etchants (Withdrawn 0308)
This edition was approved for publication by the global Audits and Reviews Subcommittee on April 15
C00339 - SEMI C3.39 - Specification for Nitrogen Trifluoride (NF3), 99.98% StdPbc-0418 org in March 2012This Standard was technically approved by the Gases Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 16, 2017. Available at www. semiviews. org and www. semi. org in January 2018; originally published in 1984; previously published October 2011. The purpose of this Document is to provide a specification for boron trifluoride (BF3) used in the semiconductor industry. This Document