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SEMI E69 — Test Method for Determining Reproducibility and Zero Drift for Thermal Mass Flow Controllers
This Guide incorporates the following methodologies:
SEMI E37 — Specification for High-Speed SECS Message Service (HSMS) Generic Services
SEMI E138-0217 (title change)
if necessary
F02100 - SEMI F21 - Classification of Airborne Molecular Contaminant Levels in Clean Environments Revision:SEMI F21-1016 - Current SEMI E69 — Test MethodThis Standard was technically approved by the Gases Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on August 31, 2016. Available at www. semiviews. org and www. semi. org in October 2016; originally published in 1995; previously published November 2002. NOTICE: This Document was completely rewritten in 2016. The purpose of this Standard is to classify microelectronics clean