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P02000 - SEMI P20 - EBレジストパラメータのカタログ公表のガイドライン(提案) StdPbc-1104 This edition was approved for

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Description

This edition was approved for publication by the global Audits and Reviews Subcommittee on June 4

This Specification does not address the marking techniques that may be employed when complying with this Standard

本仕様の目的は,単一もしくは多数のポートを持ったツールに,SMIFの統合を可能にするために,ツール内に必要とする空間を用意することである。

메소드(Method)가 레시피 가변 매개변수(recipe variable parameters)들을 이용하기 위해 정의되지만

it is necessary to consider two main situations:

P02000 - SEMI P20 - EBレジストパラメータのカタログ公表のガイドライン(提案) StdPbc-1104 This edition was approved forNOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI Global Micropatterning CommitteeJapanese Micropatterning Committee2003428Japanese Regional Standards Committee20036www. semi. org200371992 NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to

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