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Define and develop lithography alignment strategy for C2C
This Document is intended to define a set of requirements to ensure interoperability of load ports and carriers without limiting innovative solutions
The same collection events and data parameters are available to identify all substrate(s) and recipe activity information
optical stylus
SEMI D6-0211 (technical revision)
D00900 - SEMI D9 - Terminology for FPD Substrates Revision:SEMI D9-0303 (Reapproved 0321) - Superseded Define and develop lithography alignment1 Purpose 1. 1 This Standard provides terms and definitions of materials and defects within and on the surface of flat panel display (FPD) substrates and of dimensional, thermal, chemical, optical, and mechanical properties of FPD substrates. 2 Scope 2. 1 These terms and definitions are applicable to both front and back substrates used in FPD fabrication. NOTICE: SEMI Standards and Safety Guidelines do not purport to address all safety issues