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and knowledge included in the semiconductor and related industries
This Test Method is applicable to specimens ranging in size from 5 mm in diameter to as large as the supporting components can accommodate
The method is sensitive to Na+
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F05200 - SEMI F52 - Dimensional Specification for Metric PFA Tubes for Semiconductor and Flat Panel Display Manufacturing StdPbc-0312 and knowledge included in theThis specification was technically approved by the Global Liquid Chemical Distribution Systems Committee and is the direct responsibility of the Japanese Liquid Chemical Distribution Systems Committee. Current edition approved by the Japanese Regional Standards Committee on June 19, 2001. Initially available on www. semi. org August 2001; to be published November 2001. Originally published June 2000. NOTICE: This Standard or Safety Guideline has an