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SEMI MF1727 — Practice for Detection of Oxidation Induced Defects in Polished Silicon Wafers
For application to wafers of diameter larger than 3 inch
requirements
SEMI M52-0923 (technical revision)
SEMI MF671-0707 (technical revision)
PV09000 - SEMI PV90 - Guide for Material Requirements of Internal Feeders Used in Monocrystal Silicon Growers Revision:SEMI PV90-0319 - Superseded SEMI MF1727 — Practice for1 Purpose 1. 1 An internal feeder is a device that enables the loading of additional polycrystalline silicon into the crucible of a crystal grower for either top up or recharge purposes, while still maintaining full furnace vacuum and temperature conditions. 1. 2 Internal feeders are widely used in the photovoltaic industry for growing monocrystalline silicon. During the feeding process the high purity polycrystalline silicon is in close contact with
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