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1 The purpose of this Standard is to standardize requirements for grades of hydrochloric acid used in the semiconductor industry and testing procedures to support those specifications
Many requirements given in this Specification are in the form of maximum or minimum dimensions with very few required surfaces
SEMI E157-0211 (technical revision)
SEMI E1-1110 (Reapproved 0816)
parallel transmittance
E12200 - SEMI E122 - Specification for Tester Equipment Specific Equipment Model (TSEM) Revision:SEMI E122-0703 (Reapproved 1109) - Superseded 1 The purpose of thisThis Standard establishes a Specific Equipment Model for testing equipment (TSEM). The TSEM consists of equipment characteristics and behaviors that apply to this class of equipment. These characteristics and behaviors are required to be implemented. The intent of this Standard is to facilitate the integration of testing equipment into an automated semiconductor factory. This Standard accomplishes this by defining an operational model for testing