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E11800 - SEMI E118 - ウェーハIDリーダ通信インタフェースの仕様 — ウェーハIDリーダの機能スタンダード: 概念,動作,サービス StdPbc-0812 and subsurface effects

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Description

and subsurface effects

This Standard accomplishes this by defining an operational model for Stocker SEM equipment as viewed by a factory automation controller (Host)

This document describes the method to measure the abrasive characteristics of molding compounds by measuring mold orifice weight loss as a function of molded volume

This Test Method describes a procedure which may be used to rank the pitting corrosion resistance of wetted surfaces of tubing or components of finished surfaces intended for use in corrosive gas systems

5  The purpose of this Standard is to provide Wafer Job Management Job Object (WJMJOBJ) model so that the information that should be managed in conjunction with the WJMJ can be encapsulated in the object and can be accessed from the host

E11800 - SEMI E118 - ウェーハIDリーダ通信インタフェースの仕様 — ウェーハIDリーダの機能スタンダード: 概念,動作,サービス StdPbc-0812 and subsurface effectsGlobal Information and Control CommitteeJapan Information and Control Committee2002719Japan Regional Standards Committee200210www. semi. org200211 E 20052R2 1 SEMI E118200411SEMI E118. 1 IDID() ID IDID ID ID SEMIID Subordinate Standard: SEMI E118. 1 1104 IDSECS ISECS II Referenced SEMI Standards SEMI E4 SEMI Equipment Communications Standard 1 Message Transfer (SECS I) SEMI E5 SEMI Equipment Communications Standard 2 Message Content (SECS II) SEMI E15

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